Atomistic model of ultra-smooth amorphous thin film growth by low-energy ion-assisted physical vapour deposition
R. Alvarez, L. Vazquez, R. Gago, A. Redondo-Cubero, J. Cotrino, A. Palmero
Journal of Physics D: Applied Physics, 46 (2013) 395303 (10pp)
doi: 10.1088/0022-3727/46/39/395303
Enhancement of visible light-induced surface photo-activity of nanostructured N–TiO2 thin films modified by ion implantation
P. Romero-Gomez, C. Lopez-Santos, A. Borras, J.P. Espinos, A. Palmero, A.R. Gonzalez-Elipe
Chemical Physics Letters, 582 (2013) 95-99
doi: 10.1016/j.cplett.2013.07.025
Growth of SiO2 and TiO2 thin films deposited by reactive magnetron sputtering and PECVD by the incorporation of non-directional deposition fluxes
R. Alvarez, P. Romero-Gomez, J. Gil-Rostra, J. Cotrino, F. Yubero, A.R. González-Elipe,A. Palmero
Physics Status Solidi A, 210 (2013) 796–801
doi: 10.1002/pssa.201228656
Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures
R. Alvarez, J.M. García-Martín, M. Macías-Montero, L. González-García, J.C. González, V. Rico, J. Perlich, J. Cotrino, A.R. González-Elipe, A. Palmero
Nanotechnology, 24 (2013) 045604 (9pp)
doi: 10.1088/0957-4484/24/4/045604
2012
Influence of plasma-generated negative oxygen ion impingement on magnetron sputtered amorphous SiO2 thin films during growth at low temperatures
M. Macias-Montero, F.J. Garcia-Garcia, R. Álvarez, J. Gil-Rostra, J.C. González, J. Cotrino, A.R. Gonzalez-Elipe, A. Palmero
Journal of Applied Physics, 111 (2012) 054312
doi: 10.1063/1.3691950
2011
Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles
R. Álvarez, L. González-García, P. Romero-Gómez, V.J. Rico, J. Cotrino, A.R. González-Elipe, A. Palmero
Journal of Physics D: Applied Physics, 44 (2011) 385302 (7)
doi: 10.1088/0022-3727/44/38/385302
2010
Tilt angle control of nanocolumns grown by glancing angle sputtering at variable argon pressures
J.M. García-Martín, R. Alvarez, P. Romero-Gómez, A. Cebollada, A. Palmero
Applied Physics Letters, 97 (2010) 173103 (3)
doi: 10.1063/1.3506502
On the microstructure of thin films grown by an isotropically directed deposition flux
R. Alvarez, P. Romero-Gómez, J. Gil-Rostra, J. Cotrino, F. Yubero, A. Palmero, A.R. González-Elipe
Journal of Applied Physics, 108 (2010) 064316 (7)
doi: 10.1063/1.3483242
Surface nanostructuring of TiO2 thin films by high energy ion irradiation
P. Romero-Gomez, A. Palmero, T. Ben, J.G. Lozano, S.I. Molina, A.R. González-Elipe
Physical Review B, 82 (2010) 115420 (8)
doi: 10.1103/PhysRevB.82.115420
Morphological evolution of pulsed laser deposited ZrO2 thin films
R. Álvarez, A. Palmero, L.O. Prieto-López, F. Yubero, J. Cotrino, W. de la Cruz, H. Rudolph, F.H.P.M. Habraken, A.R. González-Elipe
Journal of Applied Physics, 107 (2010) 054311 (10)
doi: 10.1063/1.3318604