Perspectives on oblique angle deposition of thin films: From fundamentals to devices
Angel Barranco, Ana Borras, Agustin R. Gonzalez-Elipe, Alberto Palmero
Progress in Materials Science, 76 (2016) 59-153
doi: 10.1016/j.pmatsci.2015.06.003
Nanotechnology on Surfaces and Plasma
Research Group on Thin Films Engineering and Plasma Technology
