High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles
Rafael Alvarez, Aurelio Garcia-Valenzuela, Carmen Lopez-Santos, Francisco J. Ferrer, Victor Rico, Elena Guillen, Mercedes Alcon-Camas, Ramon Escobar-Galindo, Agustin R. Gonzalez-Elipe, Alberto Palmero
Plasma Processes and Polymers, Early Wiew (2016)
doi: 10.1002/ppap.201600019
Nanostructured Ti thin films by magnetron sputtering at oblique angles
R. Alvarez, J.M. Garcia-Martin, A. Garcia-Valenzuela, M. Macias-Montero, F.J. Ferrer, J. Santiso, V. Rico, J. Cotrino, A.R. González-Elipe, A. Palmero
Journal of Physics D: Applied Physics 49, 045303 (2016)
doi: 10.1088/0022-3727/49/4/045303
Perspectives on oblique angle deposition of thin films: From fundamentals to devices
Angel Barranco, Ana Borras, Agustin R. Gonzalez-Elipe, Alberto Palmero
Progress in Materials Science, 76 (2016) 59-153
doi: 10.1016/j.pmatsci.2015.06.003
2015
Nanocolumnar coatings with selective behavior towards osteoblast and Staphylococcus aureus proliferation
I. Izquierdo-Barba, J.M. García-Martín, R. Álvarez, A. Palmero, J. Esteban, C. Pérez-Jorge, D. Arcos, M. Vallet-Regí
Acta Biomaterialia, 15 (2015) 20-28
doi: 0.1016/j.actbio.2014.12.023
Modulating Low Energy Ion Plasma Fluxes for the Growth of Nanoporous Thin Films
R. Alvarez, C. López-Santos, F.J. Ferrer, V. Rico, J. Cotrino, A.R. González-Elipe, A. Palmero
Plasma Processes and Polymers, 12 (2015) 719
doi: 10.1002/ppap.201400209
2014
On the kinetic and thermodynamic electron temperatures in non-thermal plasmas
R. Alvarez, J. Cotrino, A. Palmero
EPL (Europhysics Letters), 105 (2014) 1
doi: 10.1209/0295-5075/105/15001
On the Deposition Rates of Magnetron Sputtered Thin Films at Oblique Angles
R. Alvarez, J.M. García-Martin, M.C. López-Santos, V.Rico, F.J. Ferrer, J. Cotrino, A.R. González-Elipe, A. Palmero
Plasma Processes and Polymers, 11(6) (2014) 511
doi: 10.1002/ppap.201300201
Nanocolumnar Growth of Thin Films deposited at Oblique Angles: Beyond the Tangent Rule
R. Alvarez, C. López-Santos, J. Parra-Barranco, V. Rico, A. Barranco, J. Cotrino, A.R. González-Elipe, A. Palmero
Journal of Vacuum Science and Technology B, 32(4) (2014) 041802
doi: 10.1116/1.4882877
On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
V. Godinho, P. Moskovkin, R. Alvarez, J. Caballero-Hernandez, R. Schierholz, B. Bera, J. Demarche, A. Palmero, A. Fernández, S Lucas
Nanotechnology, 25 (2014) 355705
doi: 10.1088/0957-4484/25/35/355705
2013
Atomistic model of ultra-smooth amorphous thin film growth by low-energy ion-assisted physical vapour deposition
R. Alvarez, L. Vazquez, R. Gago, A. Redondo-Cubero, J. Cotrino, A. Palmero
Journal of Physics D: Applied Physics, 46 (2013) 395303 (10pp)
doi: 10.1088/0022-3727/46/39/395303