Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles
Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles
R Alvarez, A Garcia-Valenzuela, G Regodon, FJ Ferrer, V Rico, JM García-Martín, AR Gonzalez-Elipe, A Palmero,
Nanotechnology 35(9), 095705 (2024)
2023
Structure and Void Connectivity in Nanocolumnar Thin Films Grown by Magnetron Sputtering at Oblique Angles
Low temperature nucleation of thermochromic VO2 crystal domains in nanocolumnar porous thin films
Plasmas and acoustic waves to pattern the nanostructure and chemistry of thin films
2021
Patterning and control of the nanostructure in plasma thin films with acoustic waves: Mechanical: vs. electrical polarization effects
Electrical and reaction performances of packed-bed plasma reactors moderated with ferroelectric or dielectric materials
Electrochromic response and porous structure of WO3 cathode layers
2020
Positron annihilation analysis of nanopores and growth mechanism of oblique angle evaporated TiO2 and SiO2 thin films and multilayers
García-Valenzuela, A., Butterling, M., Liedke, M.O., Hirschmann, E., Trinh, T.T., Attallah, A.G., Wagner, A., Alvarez, R., Gil-Rostra, J., Rico, V., Palmero, A., González-Elipe, A.R.
Microporous and Mesoporous Materials, 295 (2020) 109968
2019
SiOx by magnetron sputtered revisited: Tailoring the photonic properties of multilayers
García-Valenzuela, A., Alvarez, R., Espinós, J.P., Rico, V., Gil-Rostra, J., Palmero, A., Gonzalez-Elipe, A.R.
Applied Surface Science, 488 (2019) 791-800
Kinetic energy-induced growth regimes of nanocolumnar Ti thin films deposited by evaporation and magnetron sputtering
Alvarez, R., Garcia-Valenzuela, A., Rico, V., Garcia-Martin, J.M., Cotrino, J., Gonzalez-Elipe, A.R., Palmero, A.
Nanotechnology, 30 (2019) 475603