Structural control in porous/compact multilayer systems grown by magnetron sputtering

A. Garcia-Valenzuela, C. Lopez-Santos, R. Alvarez, V. Rico, J. Cotrino, A. R. Gonzalez-Elipe, A. Palmero

Nanotechnology, 28 (2017) 465605

DOI: 10.1088/1361-6528/aa8cf4

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Nanocolumnar association and domain formation in porous thin films grown by evaporation at oblique angles

C. Lopez-Santos, R. Álvarez, A. García-Valenzuela, V. Rico, M. Loeffler, A. R. González-Elipe and A. Palmero.

Nanotechnology, 27 (2016), 395702 (9 pp)


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Stoichiometric Control of SiOx Thin Films Grown by Reactive Magnetron Sputtering at Oblique Angles

Garcia-Valenzuela, Aurelio; Alvarez, Rafael; Lopez-Santos, Carmen; Ferrer, Francisco; Rico, Victor; Guillen, Elena; Alcon-Camas, Mercedes; Escobar-Galindo, Ramon; Gonzalez-Elipe, Agustin; Palmero, Alberto.

Plasma, Processes and Polymers 13, (2016), 1242  (6 pp).

DOI: 10.1002/ppap.201600077DOI: 10.3390/polym9090410

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High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

Rafael Alvarez, Aurelio Garcia-Valenzuela, Carmen Lopez-Santos, Francisco J. Ferrer, Victor Rico, Elena Guillen, Mercedes Alcon-Camas, Ramon Escobar-Galindo, Agustin R. Gonzalez-Elipe, Alberto Palmero
Plasma Processes and Polymers, Early Wiew (2016)
doi: 10.1002/ppap.201600019

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Nanostructured Ti thin films by magnetron sputtering at oblique angles

R. Alvarez, J.M. Garcia-Martin, A. Garcia-Valenzuela, M. Macias-Montero, F.J. Ferrer, J. Santiso, V. Rico, J. Cotrino, A.R. González-Elipe, A. Palmero
Journal of Physics D: Applied Physics 49, 045303 (2016)
doi: 10.1088/0022-3727/49/4/045303

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