On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
V. Godinho, P. Moskovkin, R. Alvarez, J. Caballero-Hernandez, R. Schierholz, B. Bera, J. Demarche, A. Palmero, A. Fernández, S Lucas
Nanotechnology, 25 (2014) 355705
doi: 10.1088/0957-4484/25/35/355705