Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)
F.J. Ferrer, M. Alcaire, J. Caballero-Hernández, F.J. García-García, J. Gil-Rostra, A. Terriza, V. Godinho, J. García-López, A. Barranco, A. Fernández-Camacho
Nuclear Instruments and Methods in Physics Research B, 332 (2014) 449-453
doi: 10.1016/j.nimb.2014.02.124
2012
Quantification of low levels of fluorine content in thin films
F.J. Ferrer, J. Gil-Rostra, A. Terriza, G. Rey, C. Jiménez, J. García-López, F. Yubero
Nuclear Instruments and Methods in Physics Research B, 274 (2012) 65-69
doi: 10.1016/j.nimb.2011.11.042