Global model of a low pressure ECR microwave plasma applied to the PECVD of SiO2 thin films
A. Yanguas-Gil, J. Cotrino, A.R. González-Elipe
Journal of Physics D: Applied Physics, 40 (2007) 3411-3422
doi: 10.1088/0022-3727/40/11/023
Using ion beams to tune the nanostructure and optical response of co-deposited Ag : BN thin films
J. Toudert, D. Babonneau, S. Camelio, T. Girardeau, F. Yubero, J.P. Espinós, A.R. González-Elipe
Journal of Physics D: Applied Physics, 40 (2007) 4614–4620
doi: 10.1088/0022-3727/40/15/038