Design and control of porosity in oxide thin films grown by PECVD
A.I. Borras, A. Barranco, A.R. González-Elipe
Journal of Material Science, 41 (2006) 5220-5226
doi: 10.1007/s10853-006-0431-y
A.I. Borras, A. Barranco, A.R. González-Elipe
Journal of Material Science, 41 (2006) 5220-5226
doi: 10.1007/s10853-006-0431-y