2006

Precise determination of metal effective work function and fixed oxide charge in MOS capacitors with high-κ dielectric

M. Tapajna, K. Husekova, J.P. Espinós, L. Harmatha, K. Fröhlich
Materials Science in Semiconductor Processing, 9 (2006) 969-974
doi: 10.1016/j.mssp.2006.10.012

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Characterization of rare earth oxides based MOSFET gate stacks prepared by metal-organic chemical vapour deposition

K. Fröhlich, R. Luptak, E. Dobrocka, K. Husekova, K. Cico, A. Rosova, M. Lukosius, A. Abrutis, P. Pisecny, J.P. Espinós
Materials Science in Semiconductor Processing, 9 (2006) 1065-1072
doi: 10.1016/j.mssp.2006.10.025

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X-ray photoelectron spectroscopy study of the nucleation processes and chemistry of CdS thin films deposited by sublimation on different solar cell substrate materials

J.P. Espinós, A.I. Martín-Concepción, C. Mansilla, F. Yubero, A.R. González-Elipe
Journal of Vacuum Science and Technology A, 24 (2006) 919-928
doi: 10.1116/1.2198868

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Type of precursor and synthesis of silicon oxycarbide (SiOxCyH) thin films with a surfatron microwave oxygen/argon plasma

A. Walkiewicz-Pietrzykowska, J.P. Espinós, A.R. González-Elipe
Journal of Vacuum Science and Technology A, 24 (2006) 988-994
doi: 10.1116/1.2204927

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