Plasma assisted oblique angle deposition of transparent and conductive in-plane anisotropic ITO thin films
J. Parra-Barranco, J.R. Sanchez-Valencia, F.J. Aparicio, F. Garcia-Garcia, F.J. Ferrer, V. Rico, C. Lopez-Santos, A. Borras, A.R. Gonzalez-Elipe, A. Barranco
ECS Transactions, 77 (2017) 9-15