Plasmas and acoustic waves to pattern the nanostructure and chemistry of thin films
V Rico, GF Regodón, A Garcia-Valenzuela, MA Alcaide, M Oliva-Ramírez, TC Rojas, R Alvarez, FJ Palomares, A Palmero, AR Gonzalez-Elipe,
Acta Materialia 255, 119058 (2023)