Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles – Nanotechnology on Surfaces and Plasma

Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles
R Alvarez, A Garcia-Valenzuela, G Regodon, FJ Ferrer, V Rico, JM García-Martín, AR Gonzalez-Elipe, A Palmero,
Nanotechnology 35(9), 095705 (2024)

Growth dynamics of nanocolumnar thin films deposited by magnetron sputtering at oblique angles

Etiquetado en:A. Palmero A.R. González-Elipe Nanotechnology R. Alvarez V. Rico

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