Simultaneous quantification of light elements in thin films deposited on Si substrates using proton EBS (Elastic Backscattering Spectroscopy)

F.J. Ferrer, M. Alcaire, J. Caballero-Hernández, F.J. García-García, J. Gil-Rostra, A. Terriza, V. Godinho, J. García-López, A. Barranco, A. Fernández-Camacho Nuclear Instruments and Methods in Physics Research B, 332 (2014) 449-453 doi: 10.1016/j.nimb.2014.02.124