(WO/2002/086190) CONSEJO SUPERIOR DE INVESTIGACIONES CIENTÍFICAS UNIVERSIDAD DE SEVILLA Inventors: Ángel Barranco Quero, Francisco Yubero Valencia, Juan Pedro Espinós Manzorro, Agustín Rodríguez González-Elipe, José Cotrino Bautista The invention relates to a method for preparing thin layers of inorganic oxides on
Nanotechnology on Surfaces and Plasma
Research Group on Thin Films Engineering and Plasma Technology
