2016

High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

Rafael Alvarez, Aurelio Garcia-Valenzuela, Carmen Lopez-Santos, Francisco J. Ferrer, Victor Rico, Elena Guillen, Mercedes Alcon-Camas, Ramon Escobar-Galindo, Agustin R. Gonzalez-Elipe, Alberto Palmero
Plasma Processes and Polymers, Early Wiew (2016)
doi: 10.1002/ppap.201600019

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Nanostructured Ti thin films by magnetron sputtering at oblique angles

R. Alvarez, J.M. Garcia-Martin, A. Garcia-Valenzuela, M. Macias-Montero, F.J. Ferrer, J. Santiso, V. Rico, J. Cotrino, A.R. González-Elipe, A. Palmero
Journal of Physics D: Applied Physics 49, 045303 (2016)
doi: 10.1088/0022-3727/49/4/045303

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