J. Chaboy, A. Barranco, A. Yanguas-Gil, F. Yubero, A.R. González-Elipe
Physical Review B, 75 (2007) 075205 (1-6)
This work reports on x-ray absorption spectroscopy study at the Si K edge of several amorphous SiOxCyHz polymers prepared by plasma-enhanced chemical-vapor deposition with different C∕Oratios. SiO2 and SiC have been used as reference materials. The comparison of the experimental Si K-edge x-ray absorption near-edge structure spectra with theoretical computations based on multiple scattering theory has allowed us to monitor the modification of the local coordination around Si as a function of the overall C∕O ratio in this kind of materials.